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...T.; Frye, G. C.; Wohltjen, H. |title=Acoustic Wave Sensors.Theory, Design, and Physico-Chemical Applications|publisher=Academic Press|location=New York|ye ...terdigitated transducer (IDT) on one side of the surface of the substrate, and an output IDT on the other side of the substrate. The space between the ID ...

...m solar cell manufactured at Cal Poly Microfab Clean Room.jpg|thumb|A gold and aluminum sputtered solar cell manufactured from a <100> p-type silicon wafe ...silicon wafers between 1 and 100&nbsp;[[μm]].<ref>[[Microelectromechanical systems]]</ref> ...

...ging+arrays+and+systems&pg=PP1 |title=Uncooled Infrared Imaging Arrays and Systems |date=1997-11-24 |publisher=Academic Press |isbn=978-0-08-086444-0 |languag ...hich determine the [[Thermal capacity|thermal capacitance]] of the sensor, and two folding arms that determine the sensor [[thermal conductivity]]. ...

...tegration in recent years. Their miniaturized overall size, potential cost and improved dosing accuracy compared to existing miniature pumps fuel the grow ...uthor=Amirouche|display-authors=etal|title= Current micropump technologies and their biomedical applications|journal= Microsystem Technologies |volume= 15 ...

...op-casting polymer material mixed with a photoinitiator on the glass slide and then pre-baking. Afterward, the 3D microstructure is fabricated using a dir ...change (usually [[polymerization]]) occurs at the focal spot of the laser and can be controlled to create an arbitrary three-dimensional pattern. This me ...