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...st]]-based techniques).[[Image:StencilLithography.jpg|Schematic of stencil lithography]] Stencil lithography was first reported in a scientific journal as a micro-structuring technique ...

* the prediction of layer width in [[Etching (microfabrication)|etching]].<ref>{{Cite book|last1=Susto|first1=G. A.|last2=Johnston|first2= [[Category:Lithography (microfabrication)]] ...

...ssociated with the transition to a [[22 nm process|22 nanometer]] [[CMOS]] microfabrication process and has become instrumental in further shrinking the design nodes a ...of California, Berkeley from the early 1980s. These tools were limited to lithography process optimization as the algorithms were limited to a few square microme ...

...n removing select portions of [[thin films]] used in [[microfabrication]]. Microfabrication is the production of parts on the micro- and nano- scale, typically on the * [[microfabrication]] ...

...n be structured via [[ultra-violet|UV]]-exposure, tempering and [[Etching (microfabrication)|etching]]: Crystal [[nucleation]] grow in Foturan when exposed to [[ultrav ...ontact lithography]] or [[Photolithography#Contact and proximity|proximity lithography]] to expose certain patterns), a chemical reaction is started in the expose ...

...2 mm x 0.3 mm x 0.4 mm) [[3D-printed]] on a [[pencil]] tip via multiphoton lithography]] '''Multiphoton lithography''' (also known as '''direct laser lithography''' or '''direct laser writing''') is similar to standard [[photolithography ...

'''Local oxidation nanolithography''' ('''LON''') is a [[scanning probe lithography|tip-based]] [[nanofabrication]] method. It is based on the spatial confinem ...and finally the SiNW is connected to the whole circuit using Electron Beam lithography.]] ...

...pher|author2=Stephan Kramer |author3=Ryan R. Fuierer |title=Scanning Probe Lithography Using Self-Assembled Monolayers|journal=Chemical Reviews|year=2003|volume=1 ...illing an insulated tip with a [[focused ion beam]] (FIB). [[Electron-beam lithography]] has also been demonstrated to reproducibly generate SECM-AFM probes using ...

...us substrates provide important functionalities for the [[Microfabrication|microfabrication industry]], and the ''n'', ''k'', as well as the thickness, ''t'', of these ...ent example of a photoresist (polymer) material used for 248&nbsp;nm micro-lithography. Six terms were used in the Forouhi–Bloomer equations for crystalline mater ...

With the development of microfabrication and nanotechnology, the study of microfluidics and nanofluidics is drawing ...romachining with sacrificial layers, nano-imprinting lithography, and soft-lithography. ...

...ocrystalline silicon]] wafers (100 oriented) are structured by doublesided lithography and etched by silicon wet etching (using potassium hydroxide solution KOH). ...

...ion process for X-ray gratings is [[LIGA]], which is based on deep [[X-ray lithography]] and electroplating. It was developed in the 1980s for the fabrication of ...ly demanding, masks are cheap, easy to fabricate (e.g.do not require X-ray lithography) and can already be scaled to large areas. The method is easily extended to ...