File:Secondary Electrons from Layers under EUV Resist.png
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Size of this preview: 800 × 190 pixels. Other resolutions: 320 × 76 pixels | 1,403 × 333 pixels.
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Summary
| Description |
English: Secondary electrons (yellow) emerge from the underlayer (magenta) and the layer underneath the underlayer (orange or purple). These electrons expose the resist (cyan) to different degrees, affecting the profile as well as pattern collapse.[1] |
| Date | |
| Source | Own work |
| Author | Guiding light |
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References
- ↑ N. Miyahara et al., Proc. SPIE 12498, 124981E (2023)
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 14:56, 17 August 2023 | | 1,403 × 333 (88 KB) | wikimediacommons>Guiding light | Uploaded own work with UploadWizard |
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