File:H and V shadowing across EUV slit.png

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H_and_V_shadowing_across_EUV_slit.png (565 × 263 pixels, file size: 16 KB, MIME type: image/png)

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Summary

Description
English: Horizontal and vertical lines exhibit different shadowing across the slit of an EUV scanner. Vertical lines have less severe but a wider range of shadowing than horizontal lines.[1] The smaller pitch has worse shadowing in all cases.
Date
Source Own work
Author Guiding light

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References

  1. Horizontal, Vertical, and Slanted Line Shadowing Across Slit in EUV Lithography Systems

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7 January 2022

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Date/TimeThumbnailDimensionsUserComment
current16:55, 27 January 2022Thumbnail for version as of 16:55, 27 January 2022565 × 263 (16 KB)wikimediacommons>Guiding lightcurve label edit

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