View source for Yttrium oxyfluoride

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| Section1 = {{Chembox Identifiers
| CASNo = 
| PubChem = 161123050
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| SMILES = [Y+3].[O-2].[F-]
| StdInChI= 1S/FH.O.Y/h1H;;/q;-2;+3/p-1
| StdInChIKey= ULEWOPXGNWLKFY-UHFFFAOYSA-M
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| Section2 = {{Chembox Properties
| Y=1|O=1|F=1
| Appearance = white powder
| Density = 5.18 g/cm<sup>3</sup>
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| Section4 = {{Chembox Structure
| CrystalStruct = tetragonal
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'''Yttrium oxyfluoride''' is an [[inorganic]] chemical compound with the formula {{chem2|YOF}}.<ref>{{cite journal|last1=Mann|first1=A. W.|last2=Bevan|first2=D. J. M.|title=The crystal structure of stoichiometric yttrium oxyfluoride, YOF|journal=[[Acta Crystallographica]]|date=1970|volume=B26|issue=12|pages=2129–2131|doi=10.1107/S0567740870005496|bibcode=1970AcCrB..26.2129M |url=http://scripts.iucr.org/cgi-bin/paper?S0567740870005496|access-date=16 June 2017}}</ref> Under normal conditions, the compound is a colorless solid.<ref>{{cite book|last1=Рипан|first1=Р.|last2=Четяну|first2=И.|title=Неорганическая химия|date=1992|language=ru}}</ref>

==Synthesis==
Yttrium oxyfluoride may be formed in the decomposition of crystalline hydrate of [[yttrium fluoride]] upon heating to 900&nbsp;°C in a vacuum:
:: <math>\mathsf{2YF_3\cdot 1/2H_2O \ \xrightarrow{\tau, 900^oC}\ YOF + YF_3 + 2HF }</math>

Yttrium oxyfluoride can also be made by hydrolysis of yttrium fluoride with [[superheated steam]] at 800&nbsp;°C:
:: <math>\mathsf{2YF_3 + H_2O \ \xrightarrow{800^oC}\ YOF + 2HF }</math>

==Physical properties==
Yttrium oxyfluoride forms colorless crystals of [[tetragonal crystal system]]; its cell parameters are: a = 0.3910&nbsp;nm, c = 0.5431&nbsp;nm. According to [[hexagonal crystal family]], the cell parameters are: a = 0.38727&nbsp;nm, c = 1.897&nbsp;nm, Z = 6.

==Applications==
Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.<ref>{{Cite journal|last1=Shiba|first1=Yoshinobu|title=Stable yttrium oxyfluoride used in plasma process chamber|journal=[[Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films]]|volume=35|issue=2|pages=021405|date=January 2017|doi=10.1116/1.4975143|bibcode=2017JVSTA..35b1405S}}</ref><ref>{{cite journal|last1=Tsunoura|first1=Toru|last2=Yoshida|first2=Katsumi|last3=Yano|first3=Toyohiko|last4=Kishi|first4=Yukio|title=Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics|journal=[[Japanese Journal of Applied Physics]]|date=2 May 2017|volume=56|issue=6S2|pages=06HC02|doi=10.7567/JJAP.56.06HC02|bibcode=2017JaJAP..56fHC02T|s2cid=126342556 }}</ref>

==References==
{{Reflist}}

{{Yttrium compounds}}
{{oxygen compounds}}
{{fluorine compounds}}
{{Authority control}}

[[Category:Yttrium compounds]]
[[Category:Oxyfluorides]]